Some doubts on thin flims materials and wafer defects?

can give three example of thin flim materials used in wafer fabrication, briefly describe the functions of the three thin flim

please briefly describe the following three wafer defects
scratches
subsurface
inter metal bridge
show suitable cd sem photos that show the defects
how the defects could form
how each of these defects can be detected

Answer:
you go girl

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